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气体流量测量校准主机 Fluke molbox RFM

产品名称: 气体流量测量校准主机 Fluke molbox RFM
产品型号: Fluke molbox RFM
产品品牌: 美国 - 福禄克
产品特色:

•molbloc-L覆盖的流量量程从1sccm到100slm,而molbloc-S覆盖的流量上限更是达到了5000slm

•从20种不同的气体中选择

•利用100:1可调性实现认证的测量不确定度±0.5%读数

•内部阀门,可实现内置的清洗、泄漏测试和自重支持

•求和、取平均值、高值/低值及偏差等高级测量函数

产品概述详细说明附件/软件相关视频用户手册相关应用

molbox RFM 流量测量主机

molbox RFM是一个辅助单元,可使用molbloc-L层流和molbloc-S声速流元件进行质量流量测量。

molbloc流量元件通过两个压力连接件和一根数据线连接到molbox RFM上。molbox RFMmolbloc EEPROM读取校准数据,并利用其内置的高精度参考压力传感器(RPT)测量molbloc的上游压力和下游压力。欧姆测量系统读取molbloc铂电阻测温仪的电阻,然后由此计算molbloc温度。利用存储在molbox RFM内存中的molbloc校准数据、压力、温度和气体属性,可计算出通过molbloc的气流流速。对于molbloc-L流量元件,在流量量程10%FS以下时,可以选择微量程选项来提高流量测量分辨度和精确度。

molbox RFMmolbloc流量元件应用广泛,适用于需要高精确度测量低气流的测量、测试和校准应用。对于主要考虑结构紧凑、量程可调性高、成本较低的应用来说,molbox RFM是理想之选。第二种型号molbox1+针对的优先考虑不确定度的应用。要配置质量流量校准系统,请查看随后几页,选择molbloc和压力相关校准,以便更好的覆盖您的流量量程和压力状况。molstic安装系统和COMPASS® for molbox流量校准软件可以帮您完善系统。

结构紧凑

molbloc-L覆盖的流量量程从1sccm100slm,而molbloc-S覆盖的流量上限更是达到了5000slm

20种不同的气体中选择

利用100:1可调性实现认证的测量不确定度±0.5%读数

内部阀门,可实现内置的清洗、泄漏测试和自重支持

包括求和、取平均值、高值/低值及偏差等高级测量函数

完善的前面板控制以及RS232IEEE-488远程通信

利用可由用户设置的参考压力和温度状态,测量质量和体积流量

 

流量测量技术指标

molbox RFM可测量通过molbloc流量元件的流量。molbloc-L的流量量程、可用工作压力和压力差,或者molbloc-S的流量量程、绝压量程,取决于所使用的molbloc元件和校准选项。请参阅 molbloc-L molbloc-S量程表,了解校准和量程详情。

molbloc-L量程最高可达3E4,可通过微量程选项提高在10% FS以下时的分辨率和精确度。对于1E5-L molbloc,必须使用微量程选项才能达到技术指标。

 

molbox RFM


molbloc-L (量程从1E1-L3E4-L)

molbloc-S (所有量程)

测量更新速率

1

1

范围

molbloc满刻度,取决于气体和molbloc压力

取决于校准类型(请参阅molbloc-L量程表)

流量相对于20kPa200kPa绝压(3psia30psia)

20kPa200kPa绝压(7psia70psia)上游

(请参阅molbloc-S量程表)

分辨率

0.01%FS

±0.01%读数

线性

±0.23%读数,从10%100%FS

±0.023%FS,在10%FS以下

±0.25%读数

重复性

±0.1%读数,从10%100%FS

±0.01%FS,在10%FS以下

±0.1%读数

精确度1

±0.25%读数,从10%100%FS

±0.025%FS,在10%FS以下

±0.3%读数

预测的稳定度2 (一年期)

±0.15%读数,从10%100%FS

±0.015%FS,在10%FS以下

读数的±0.2

测量不确定度3

 

±0.5%读数,从10%100%FS

±0.05%FS,在10%FS以下

±0.5%读数,从50kPa500kPa±0.5%流量@

50kPa20kPa50kPa


具有微量程选项的   molbox RFM


molbloc-L(量程从1E1-L3E4-L

molbloc-L(量程仅仅是1E5)

测量更新速率

1

1

范围

0molbloc满刻度,取决于气体和molbloc压力

取决于校准类型(请参阅molbloc-L表格)

0molbloc满刻度,取决于气体和molbloc压力

取决于校准类型(请参阅molbloc-L表格)

分辨率

0.01%FS0.001%FS以下

10%FS

0.01%FS

线性

±0.23%读数,从1%100%FS

±0.0023%FS,在1%FS以下

±0.25%读数,从5%100%FS

±0.0125%FS,在5%FS以下

重复性

±0.1%读数,从1%100%FS

±0.001%FS,在1%FS以下

±0.2%读数,从5%100%FS

±0.01%FS,在5%FS以下

精确度1

±0.25%读数,从1%100%FS

±0.0025%FS,在1%FS以下

±0.32%读数,从5%100%FS

±0.016%FS,在5%FS以下

预测的稳定度2
 
(一年期)

±0.15%读数,从1%100%FS

±0.0015%FS,在1%FS以下

±0.2%读数,从5%100%FS

±0.01%FS,在5%FS以下

测量不确定度3

±0.5%读数,从1%100%FS

±0.005%FS,在1%FS以下

±0.5%读数,从5%100%FS

±0.025%FS,在5%FS以下

 

molbloc-S(所有量程)

除了没有微量程以外,其他技术指标与molbox RFM相同。只要将molbox RFM连接到molbloc-S上,就会禁用微量程传感器。

 

1 精确度:包含线性度、迟滞和可重复性。

2 预测的稳定度:典型molbox RFMmolbloc在典型环境下使用时一年内从零到范围值的最大变化情况。由于稳定度只能是一种预测,因此应该根据经验建立特定molbox RFM的稳定度。

3 测量不确定度:molbox RFM流量指示相对于通过molbloc的流量真值的最大偏差,包括精确度、稳定度和DHI校准标准不确定度。molbloc的测量不确定度技术指标仅适用于使用的是molbloc校准过的气体的情况。所有 molbloc 都针对N2校准过。其他气体的校准是可选的。并非所有规格的molbloc在所有时间,对所有气体都提供DHI校准功能。请在订购前检查是否可用。

 

型号和配件

型号

描述

Molbox RFM

molbox RFM参考流量监控器

包含:
 
用户手册、校准证书、电源线、(2)molbox   RFMmolbloc压线、(1) molbox RFMmolbloc数据线、(2)直通压力快速连接器

5141-100

molbox RFM, molbloc   5E1-L 10 to 100 sccm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E1-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5141-1K

molbox RFM, molbloc   5E2-L 100 to 1,000 sccm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E2-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5141-10K

molbox RFM, molbloc   5E3-L 1 to 10 slm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E3-L laminar flow element

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5141-50K

molbox RFM, molbloc   3E4-L 5 to 50 slm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   3E4-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5142-1K

molbox RFM-M,   molbloc 5E2-L 10 to 1,000 sccm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E2-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5142-10K

molbox RFM-M,   molbloc 5E3-L 0.1 to 10 slm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E3-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5142-50K

molbox RFM-M,   molbloc 3E4-L 0.5 to 50 slm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   3E4-L laminar flow element 

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male

5144-50K

molbox RFM-M,   molblocs 5E2-L and 3E4-L10 sccm to 50 slm

Included

molbox   RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor   with quick connect molbloc pressure lines, molbloc communication cable, line   cord and user manual

molbloc   5E2-L and 3E4-L laminar flow elements

molstic-L   mounting system, with fine pressure regulator and an isolation valve and   precise flow metering valve for each molbloc-L

Tubing   and adaptors to connect gas supply and device under test, including 1/4 in   tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in   BSP male


配件

描述

MFC-CB控制盒

包括:
    (2)MFC/MFM
连接线套件
   
校准线
    
电源线
    
操作与维护手册
   
校准报告

针对molbloc/molbo用户的校准辅助软件


molstic-L安装系统


molstic-S安装系统


RFM-RMK

机架安装工具

RFM 02

微量程

 

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