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| 产品名称： | 气体流量测量校准主机 Fluke molbox RFM |
|---|---|
| 产品型号： | Fluke molbox RFM |
| 产品品牌： | 美国 - 福禄克 |
| 产品特色： | •molbloc-L覆盖的流量量程从1sccm到100slm，而molbloc-S覆盖的流量上限更是达到了5000slm •从20种不同的气体中选择 •利用100:1可调性实现认证的测量不确定度±0.5%读数 •内部阀门，可实现内置的清洗、泄漏测试和自重支持 •求和、取平均值、高值/低值及偏差等高级测量函数 |
molbox RFM 流量测量主机
molbox RFM是一个辅助单元，可使用molbloc-L层流和molbloc-S声速流元件进行质量流量测量。
molbloc流量元件通过两个压力连接件和一根数据线连接到molbox RFM上。molbox RFM从molbloc EEPROM读取校准数据，并利用其内置的高精度参考压力传感器(RPT)测量molbloc的上游压力和下游压力。欧姆测量系统读取molbloc铂电阻测温仪的电阻，然后由此计算molbloc温度。利用存储在molbox RFM内存中的molbloc校准数据、压力、温度和气体属性，可计算出通过molbloc的气流流速。对于molbloc-L流量元件，在流量量程10%FS以下时，可以选择微量程选项来提高流量测量分辨度和精确度。
molbox RFM和molbloc流量元件应用广泛，适用于需要高精确度测量低气流的测量、测试和校准应用。对于主要考虑结构紧凑、量程可调性高、成本较低的应用来说，molbox RFM是理想之选。第二种型号molbox1+针对的优先考虑不确定度的应用。要配置质量流量校准系统，请查看随后几页，选择molbloc和压力相关校准，以便更好的覆盖您的流量量程和压力状况。molstic安装系统和COMPASS® for molbox流量校准软件可以帮您完善系统。
•结构紧凑
•molbloc-L覆盖的流量量程从1sccm到100slm，而molbloc-S覆盖的流量上限更是达到了5000slm
•从20种不同的气体中选择
•利用100:1可调性实现认证的测量不确定度±0.5%读数
•内部阀门，可实现内置的清洗、泄漏测试和自重支持
•包括求和、取平均值、高值/低值及偏差等高级测量函数
•完善的前面板控制以及RS232和IEEE-488远程通信
•利用可由用户设置的参考压力和温度状态，测量质量和体积流量
流量测量技术指标
molbox RFM可测量通过molbloc流量元件的流量。molbloc-L的流量量程、可用工作压力和压力差，或者molbloc-S的流量量程、绝压量程，取决于所使用的molbloc元件和校准选项。请参阅 molbloc-L和 molbloc-S量程表，了解校准和量程详情。
molbloc-L量程最高可达3E4，可通过微量程选项提高在10% FS以下时的分辨率和精确度。对于1E5-L molbloc，必须使用微量程选项才能达到技术指标。
molbox RFM | ||
molbloc-L (量程从1E1-L到3E4-L) | molbloc-S (所有量程) | |
测量更新速率 | 1秒 | 1秒 |
范围 | 到molbloc满刻度，取决于气体和molbloc压力 取决于校准类型(请参阅molbloc-L量程表) | 流量相对于20kPa～200kPa绝压(3psia～30psia) 或20kPa～200kPa绝压(7psia～70psia)上游 (请参阅molbloc-S量程表) |
分辨率 | 0.01%FS | ±0.01%读数 |
线性 | ±0.23%读数，从10%～100%FS ±0.023%FS，在10%FS以下 | ±0.25%读数 |
重复性 | ±0.1%读数，从10%～100%FS ±0.01%FS，在10%FS以下 | ±0.1%读数 |
精确度1 | ±0.25%读数，从10%～100%FS ±0.025%FS，在10%FS以下 | ±0.3%读数 |
预测的稳定度2 (一年期) | ±0.15%读数，从10%～100%FS ±0.015%FS，在10%FS以下 | 读数的±0.2％ |
测量不确定度3
| ±0.5%读数，从10%～100%FS ±0.05%FS，在10%FS以下 | ±0.5%读数，从50kPa～500kPa，±0.5%流量@ 50kPa从20kPa～50kPa |
具有微量程选项的 molbox RFM | ||
molbloc-L（量程从1E1-L到3E4-L） | molbloc-L（量程仅仅是1E5) | |
测量更新速率 | 1秒 | 1秒 |
范围 | 从0～molbloc满刻度，取决于气体和molbloc压力 取决于校准类型（请参阅molbloc-L表格） | 从0～molbloc满刻度，取决于气体和molbloc压力 取决于校准类型（请参阅molbloc-L表格） |
分辨率 | 0.01%FS，0.001%FS以下 10%FS | 0.01%FS |
线性 | ±0.23%读数，从1%～100%FS； ±0.0023%FS，在1%FS以下 | ±0.25%读数，从5%～100%FS ±0.0125%FS，在5%FS以下 |
重复性 | ±0.1%读数，从1%～100%FS ±0.001%FS，在1%FS以下 | ±0.2%读数，从5%～100%FS ±0.01%FS，在5%FS以下 |
精确度1 | ±0.25%读数，从1%～100%FS ±0.0025%FS，在1%FS以下 | ±0.32%读数，从5%～100%FS ±0.016%FS，在5%FS以下 |
预测的稳定度2 | ±0.15%读数，从1%～100%FS ±0.0015%FS，在1%FS以下 | ±0.2%读数，从5%～100%FS ±0.01%FS，在5%FS以下 |
测量不确定度3 | ±0.5%读数，从1%～100%FS ±0.005%FS，在1%FS以下 | ±0.5%读数，从5%～100%FS ±0.025%FS，在5%FS以下 |
molbloc-S（所有量程）
除了没有微量程以外，其他技术指标与molbox RFM相同。只要将molbox RFM连接到molbloc-S上，就会禁用微量程传感器。
1 精确度：包含线性度、迟滞和可重复性。
2 预测的稳定度：典型molbox RFM和molbloc在典型环境下使用时一年内从零到范围值的最大变化情况。由于稳定度只能是一种预测，因此应该根据经验建立特定molbox RFM的稳定度。
3 测量不确定度：molbox RFM流量指示相对于通过molbloc的流量真值的最大偏差，包括精确度、稳定度和DHI校准标准不确定度。molbloc的测量不确定度技术指标仅适用于使用的是molbloc校准过的气体的情况。所有 molbloc 都针对N2校准过。其他气体的校准是可选的。并非所有规格的molbloc在所有时间，对所有气体都提供DHI校准功能。请在订购前检查是否可用。
型号和配件
型号 | 描述 |
Molbox RFM | molbox RFM参考流量监控器 包含： |
5141-100 | molbox RFM, molbloc 5E1-L 10 to 100 sccm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E1-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-1K | molbox RFM, molbloc 5E2-L 100 to 1,000 sccm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E2-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-10K | molbox RFM, molbloc 5E3-L 1 to 10 slm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E3-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5141-50K | molbox RFM, molbloc 3E4-L 5 to 50 slm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 3E4-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-1K | molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E2-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-10K | molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E3-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5142-50K | molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 3E4-L laminar flow element •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
5144-50K | molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm Included： •molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual •molbloc 5E2-L and 3E4-L laminar flow elements •molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L •Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male |
配件 | 描述 |
MFC-CB控制盒 | 包括： |
针对molbloc/molbo用户的校准辅助软件 | |
molstic-L安装系统 | |
molstic-S安装系统 | |
RFM-RMK | 机架安装工具 |
RFM 02 | 微量程 |
